Primarily Developed for semiconductor applications, the Altisurf 530 is also the basis for many metrology stations adapted to very specific customer needs.
Such as the Altisurf 500 and 520, it can integrate all kind of sensor and fixturing.
SPECIFICATIONS
AXIS:
− Length X, Y , Z (mm): 300 × 300 × 300
- Motorized DC Axis
- Flatness less than 2µm of 300mm after correction
- Max Speed. : up to 40 mm/s
− Option: Stepping 0,1 µm
− Option: double rotary axis
SENSORS:
- Wide range of embeddable sensors:
• Contact: Inductive probe with diamond tip , µ-force
• Non-contact: confocal, triangulated laser, interferometric
- High Resolution Camera
HMI:
- Automated for the production
- Link with PLCs
- Workshop Control (red light / green light)
- Definition of recipe by self-study
QUALIFICATIONS:
- Clean room
- EC
– Respect Directive Machine
Get your BROCHURE Altisurf© 530
